Aoyama, J.,
Takani, T.,
Toyabe, T. &
Kalachev, L.,
2005,
2005 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2005. Institute of Electrical and Electronics Engineers Inc.,
p. 167-170 4 p. 1562051. (International Conference on Simulation of Semiconductor Processes and Devices, SISPAD; vol. 2005).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review